@article{article, title = {{Internal structure of TiAlN/VN coating deposited on sharp edges by ion-assisted physical vapor deposition}}, url = {{}}, year = {{2004}}, month = {{7}}, author = {{Macak EB and Rodenburg JM}}, doi = {{10.1116/1.17693911}}, volume = {{22}}, journal = {{J VAC SCI TECHNOL A}}, issue = {{4}}, pages = {{1195-1199}}, note = {{Accessed on 2024/12/22}}}