@article{article, title  = {{Plasma-surface interaction at sharp edges and corners during ion-assisted physical vapor deposition. Part I: Edge-related effects and their influence on coating morphology and composition}},

 url = {{}},

 year = {{2003}},

 month = {{9}},

 author = {{Macak EB and Munz WD and Rodenburg JM}},

 doi = {{10.1063/1.1597755}},

 volume = {{94}},

 journal = {{J APPL PHYS}},

 issue = {{5}},

 pages = {{2829-2836}},

 note = {{Accessed on 2024/12/22}}}