@inbook{inbook, title = {{Nanolithography}}, publisher = {{John Wiley & Sons, Ltd}}, url = {{}}, year = {{2012}}, month = {{3}}, author = {{Leggett GJ}}, doi = {{10.1002/9780470661345.smc193}}, isbn = {{9780470746400}}, note = {{Accessed on 2024/12/22}}}