TY - CONF T1 - 3D determination of a MOSFET gate morphology by FIB tomography JO - MICROSCOPY OF SEMICONDUCTING MATERIALS 2003 UR - http://eprints.whiterose.ac.uk/148197/ PY - 2003/01/01 AU - Inkson BJ AU - Olsen S AU - Norris DJ AU - O'Neill AG AU - Mobus G ED - Cullis AG ED - Midgley PA IS - 180 SP - 611 EP - 616 Y2 - 2025/04/17 ER -