TY  - JOUR

T1  - Mass Spectral Investigation of the Radio-Frequency Plasma Deposition of Hexamethyldisiloxane

JO  - The Journal of Physical Chemistry B

UR  - http://dx.doi.org/10.1021/jp970663b

PY  - 1997/05/01

AU  - Alexander MR

AU  - Jones FR

AU  - Short RD

ED  - 

DO  - DOI: 10.1021/jp970663b

PB  - American Chemical Society (ACS)

VL  - 101

IS  - 18

SP  - 3614

EP  - 3619

Y2  - 2024/12/22

ER  -