@article{article, title = {{Atomic Layer Epitaxy}}, publisher = {{Maney Publishing}}, url = {{}}, year = {{1987}}, month = {{1}}, author = {{Simpson M and Dederski GA and Smith P}}, volume = {{3}}, journal = {{Surface Engineering}}, issue = {{4}}, pages = {{343-348}}, note = {{Accessed on 2024/12/22}}}