TY  - CONF

T1  - Effects of “processing parameters” in plasma deposition: Acrylic acid revisited

JO  - Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

UR  - http://dx.doi.org/10.1116/1.581288

PY  - 1998/12/01

AU  - Candan S

AU  - Beck AJ

AU  - O’Toole L

AU  - Short RD

ED  - 

DO  - DOI: 10.1116/1.581288

PB  - American Vacuum Society

VL  - 16

IS  - 3

SP  - 1702

EP  - 1709

Y2  - 2024/12/22

ER  -