TY - JOUR T1 - Defect growth in multilayer chromium nitride/niobium nitride coatings produced by combined high power impulse magnetron sputtering and unbalance magnetron sputtering technique JO - Thin Solid Films UR - http://dx.doi.org/10.1016/j.tsf.2017.06.027 PY - 2017/08/31 AU - Biswas B AU - Purandare Y AU - Sugumaran AA AU - Loch DAL AU - Creasey S AU - Khan I AU - Ehiasarian AP AU - Hovsepian PE ED - DO - DOI: 10.1016/j.tsf.2017.06.027 PB - Elsevier BV VL - 636 SP - 558 EP - 566 Y2 - 2024/12/22 ER -