TY - JOUR T1 - Characterization of arc discharge plasmas in the combined steered arc/unbalanced magnetron deposition process JO - Proceedings, Annual Technical Conference - Society of Vacuum Coaters PY - 2001/01/01 AU - Ehiasarian AP AU - Macak KA AU - Sch枚njahn C AU - New R AU - M眉nz WD ED - SP - 382 EP - 387 Y2 - 2025/04/17 ER -