@article{article, title  = {{Where physics meets chemistry: Thin film deposition from reactive plasmas}},

 publisher = {{Springer Science and Business Media LLC}},

 url = {{http://dx.doi.org/10.1007/s11705-016-1598-7 }},

 year = {{2016}},

 month = {{12}},

 author = {{Michelmore A and Whittle JD and Bradley JW and Short RD}},

 doi = {{10.1007/s11705-016-1598-7}},

 volume = {{10}},

 journal = {{Frontiers of Chemical Science and Engineering}},

 issue = {{4}},

 pages = {{441-458}},

 note = {{Accessed on 2024/12/22}}}