TY - CONF T1 - Optimization of in situ substrate surface treatment in a cathodic arc plasma: A study by TEM and plasma diagnostics JO - JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS PY - 2001/07/01 AU - Schonjahn C AU - Ehlasarian AP AU - Lewis DB AU - New R AU - Munz WD AU - Twesten RD AU - Petrov I ED - VL - 19 IS - 4 SP - 1415 EP - 1420 Y2 - 2025/04/17 ER -