TY  - CONF

T1  - Chemistry and aging of organosiloxane and fluorocarbon films grown from hyperthermal polyatomic ions

JO  - Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

UR  - http://dx.doi.org/10.1116/1.1349723

PY  - 2001/07/01

AU  - Hanley L

AU  - Fuoco E

AU  - Wijesundara MBJ

AU  - Beck AJ

AU  - Brookes PN

AU  - Short RD

ED  - 

DO  - DOI: 10.1116/1.1349723

PB  - American Vacuum Society

VL  - 19

IS  - 4

SP  - 1531

EP  - 1536

Y2  - 2024/12/22

ER  -