@article{article, title = {{Nanoscale EELS analysis of elemental distribution and band-gap properties in AlGaN epitaxial layers}}, url = {{}}, year = {{2011}}, month = {{1}}, author = {{Amari H and Zhang HY and Geelhaar L and Cheze C and Kappers MJ and Walther T and IOP}}, doi = {{10.1088/1742-6596/326/1/012039}}, volume = {{326}}, journal = {{17TH INTERNATIONAL CONFERENCE ON MICROSCOPY OF SEMICONDUCTING MATERIALS 2011}}, note = {{Accessed on 2024/12/22}}}