@article{article, title = {{INFLUENCE OF SILICON-NITRIDE CAP ON THE THERMAL-STABILITY OF STRAINED AL0.32GA0.68AS/IN0.1GA0.9AS HIGH MOBILITY STRUCTURES GROWN BY METALORGANIC CHEMICAL VAPOR-DEPOSITION}}, url = {{}}, year = {{1992}}, month = {{11}}, author = {{KANAAH A and ROCKETT PI and ROBERTS JS and PATE MA and WOODWARD MV}}, volume = {{10}}, journal = {{J VAC SCI TECHNOL B}}, issue = {{6}}, pages = {{2488-2490}}, note = {{Accessed on 2024/12/22}}}