TY - JOUR T1 - Subsurface nanoindentation deformation of Cu-Al multilayers mapped in 3D by focused ion beam microscopy. JO - J Microsc PY - 2001/02/01 AU - Inkson BJ AU - Steer T AU - M枚bus G AU - Wagner T ED - DO - DOI: 10.1046/j.1365-2818.2001.00767.x VL - 201 IS - 2 SP - 256 EP - 269 Y2 - 2025/04/17 ER -