TY  - JOUR

T1  - Parallel scanning near-field photolithography in liquid: The Snomipede

JO  - Microelectronic Engineering

PY  - 2011/01/01

AU  - Liu Z

AU  - Ul-Haq E

AU  - Hobbs JK

AU  - Leggett GJ

AU  - Zhang Y

AU  - Weaver JMR

AU  - Roberts CJ

ED  - 

DO  - DOI: 10.1016/j.mee.2010.12.092

VL  - 88

IS  - 8

SP  - 2109

EP  - 2112

Y2  - 2024/12/22

ER  -