@article{article, title = {{Nanoscale wafer patterning using SPM induced local anodic oxidation in InP substrates}},
publisher = {{IOP Publishing}},
url = {{https://eprints.whiterose.ac.uk/182271/ }},
year = {{2022}},
month = {{2}},
author = {{Ovenden C and Farrer I and Skolnick MS and Heffernan J}},
doi = {{10.1088/1361-6641/ac3f20}},
volume = {{37}},
journal = {{Semiconductor Science and Technology}},
issue = {{2}},
note = {{Accessed on 2025/01/07}}}