TY  - JOUR

T1  - Defects in TiN and TiAIN coatings grown by combined cathodic arc/unbalanced magnetron technology

JO  - Vacuum

UR  - http://dx.doi.org/10.1016/0042-207x(94)e0029-x

PY  - 1995/01/01

AU  - Münz W-D

AU  - Lewis DB

AU  - Creasey S

AU  - Hurkmans T

AU  - Trinh T

AU  - Ijzendorn W

ED  - 

DO  - DOI: 10.1016/0042-207x(94)e0029-x

PB  - Elsevier BV

VL  - 46

IS  - 4

SP  - 323

EP  - 330

Y2  - 2024/12/22

ER  -