@article{article, title  = {{Investigation of boron implantation into silicon by quantitative energy-filtered transmission electron microscopy}},

 url = {{}},

 year = {{2011}},

 month = {{1}},

 author = {{Walther T and England J and IOP}},

 doi = {{10.1088/1742-6596/326/1/012053}},

 volume = {{326}},

 journal = {{17TH INTERNATIONAL CONFERENCE ON MICROSCOPY OF SEMICONDUCTING MATERIALS 2011}},

 note = {{Accessed on 2024/12/22}}}