@article{article, title  = {{Controlled-width track in through silicon via using 3D holographic photolithography with modified electrodepositable photoresist}},

 url = {{}},

 year = {{2010}},

 month = {{1}},

 author = {{Toriz-Garcia JJ and Williams GL and McWilliam R and Curry R and Seed NL and Purvis A and Ivey PA}},

 doi = {{10.1088/0960-1317/20/1/015012}},

 volume = {{20}},

 journal = {{J MICROMECH MICROENG}},

 issue = {{1}},

 note = {{Accessed on 2024/12/22}}}