TY - CHAP T1 - Photolithography beyond the diffraction limit T2 - Nanolithography and Patterning Techniques in Microelectronics PY - 2005/01/01 AU - Leggett GJ ED - DO - DOI: 10.1533/9781845690908.238 SN - 9781855739314 SP - 238 EP - 266 Y2 - 2024/12/22 ER -