@inproceedings{inproceedings, title = {{Quantum lithography}}, publisher = {{SPIE}}, url = {{}}, year = {{2003}}, month = {{9}}, author = {{Braunstein SL and Boto AN and Kok P and Abrams DS and Williams CP and Dowling JP}}, doi = {{10.1117/12.497420}}, journal = {{Fluctuations and Noise in Photonics and Quantum Optics}}, note = {{Accessed on 2024/12/22}}}