@article{article, title  = {{A study of HMDSO/O2 plasma deposits using a high-sensitivity and -energy resolution XPS instrument: curve fitting of the Si 2p core level}},

 publisher = {{Elsevier BV}},

 url = {{http://dx.doi.org/10.1016/s0169-4332(98)00479-6 }},

 year = {{1999}},

 month = {{1}},

 author = {{Alexander MR and Short RD and Jones FR and Michaeli W and Blomfield CJ}},

 doi = {{10.1016/s0169-4332(98)00479-6}},

 volume = {{137}},

 journal = {{Applied Surface Science}},

 issue = {{1-4}},

 pages = {{179-183}},

 note = {{Accessed on 2024/12/22}}}