@inproceedings{inproceedings, title = {{PZT films for micro-pumps}}, url = {{}}, year = {{1995}}, month = {{1}}, author = {{Brooks K and Damjanovic D and Kholkin A and Reaney I and Setter N and Luginbuhl P and Racine GA and DeRooij NF and Saaman A}}, doi = {{10.1080/10584589508012296}}, volume = {{8}}, journal = {{INTEGRATED FERROELECTRICS}}, issue = {{1-2}}, pages = {{13-23}}, note = {{Accessed on 2025/04/16}}}