@article{article, title  = {{Microplasma copolymerization of amine and Si containing precursors}},

 url = {{}},

 year = {{2014}},

 month = {{1}},

 author = {{Bashir M and Zimmerman WB and Rees JM and Bashir S}},

 doi = {{10.1016/j.tsf.2014.06.004}},

 journal = {{Thin Solid Films}},

 note = {{Accessed on 2024/12/22}}}