@article{article, title  = {{The Snomipede: A parallel platform for scanning near-field photolithography}},

 url = {{}},

 year = {{2011}},

 month = {{12}},

 author = {{ul-Haq E and Liu Z and Zhang Y and Ahmad SAA and Wong LS and Hobbs JK and Leggett GJ and Micklefield J and Roberts CJ and Weaver JMR}},

 doi = {{10.1557/jmr.2011.370}},

 volume = {{26}},

 journal = {{JOURNAL OF MATERIALS RESEARCH}},

 issue = {{24}},

 pages = {{2997-3008}},

 note = {{Accessed on 2024/12/22}}}