TY  - JOUR

T1  - Mass spectral investigation of the plasma phase of a pulsed plasma of acrylic acid

JO  - Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

UR  - http://dx.doi.org/10.1116/1.1316099

PY  - 2000/01/01

AU  - Haddow DB

AU  - Beck AJ

AU  - France RM

AU  - Fraser S

AU  - Whittle JD

AU  - Short RD

ED  - 

DO  - DOI: 10.1116/1.1316099

PB  - American Vacuum Society

VL  - 18

IS  - 6

SP  - 3008

EP  - 3011

Y2  - 2024/12/22

ER  -