TY - CONF T1 - Quantum lithography, entanglement and Heisenberg-limited parameter estimation JO - Journal of Optics B: Quantum and Semiclassical Optics PY - 2004/08/01 AU - Kok P AU - Braunstein SL AU - Dowling JP ED - DO - DOI: 10.1088/1464-4266/6/8/029 PB - IOP Publishing VL - 6 IS - 8 SP - S811 EP - S815 Y2 - 2024/12/22 ER -