TY  - JOUR

T1  - Nanowear in scanning force microscopy: Information on deposits formed in and downstream of a hexane plasma

JO  - Journal of Applied Physics

PY  - 2002/01/01

AU  - Dinelli F

AU  - Leggett GJ

AU  - Alexander MR

ED  - 

DO  - DOI: 10.1063/1.1446220

PB  - AIP Publishing

VL  - 91

IS  - 6

SP  - 3841

EP  - 3846

Y2  - 2024/12/22

ER  -