@inproceedings{inproceedings, title  = {{Planar InAs photodiodes fabricated using He ion implantation}},

 url = {{}},

 year = {{2012}},

 month = {{1}},

 author = {{Sandall I and Tan CH and Smith A and Gwilliam R}},

 doi = {{10.1109/IPCon.2012.6358542}},

 isbn = {{9781457707315}},

 journal = {{2012 IEEE Photonics Conference, IPC 2012}},

 pages = {{165-166}},

 note = {{Accessed on 2024/10/18}}}