@article{article, title = {{Triode technology in the sputter deposition of carbon films}}, publisher = {{Elsevier BV}}, url = {{}}, year = {{1988}}, month = {{1}}, author = {{Fitzgerald AG and Simpson M and Dederski GA and MoiR PA and Matthews A and Tither D}}, doi = {{10.1016/0008-6223(88)90042-5}}, volume = {{26}}, journal = {{Carbon}}, issue = {{2}}, pages = {{229-234}}, note = {{Accessed on 2024/12/22}}}