@article{article, title  = {{Matching the resolution of electron beam lithography by scanning near-field photolithography}},

 url = {{}},

 year = {{2004}},

 month = {{8}},

 author = {{Sun S and Leggett GJ}},

 doi = {{10.1021/nl049540a}},

 volume = {{4}},

 journal = {{NANO LETT}},

 issue = {{8}},

 pages = {{1381-1384}},

 note = {{Accessed on 2024/12/22}}}