@article{article, title  = {{Atomic Plane Misorientation Assisted Crystalline Quality Improvement in Epitaxial Growth of AlN on a Nanopatterned Sapphire (0001) Surface for Deep Ultraviolet Photoelectric Devices}},

 publisher = {{American Chemical Society (ACS)}},

 url = {{http://dx.doi.org/10.1021/acsanm.2c05372 }},

 year = {{2023}},

 month = {{3}},

 author = {{Deng Y and Xie N and Hu W and Ma Z and Xu F and Chen L and Qiu W and Zhao L and Tao H and Wu B and Huang Y et al}},

 doi = {{10.1021/acsanm.2c05372}},

 journal = {{ACS Applied Nano Materials}},

 note = {{Accessed on 2024/12/22}}}