TY - JOUR T1 - Parallel scanning near-field photolithography in liquid: The Snomipede JO - Microelectronic Engineering PY - 2011/01/01 AU - Liu Z AU - Ul-Haq E AU - Hobbs JK AU - Leggett GJ AU - Zhang Y AU - Weaver JMR AU - Roberts CJ ED - DO - DOI: 10.1016/j.mee.2010.12.092 VL - 88 IS - 8 SP - 2109 EP - 2112 Y2 - 2025/04/07 ER -