@inproceedings{inproceedings, title = {{High resolution dopant profiling in the SEM, image widths and surface band-bending - art. no. 012033}}, url = {{}}, year = {{2008}}, month = {{1}}, author = {{Chee KWA and Rodenburg C and Humphreys CJ}}, volume = {{126}}, journal = {{EMAG: ELECTRON MICROSCOPY AND ANALYSIS GROUP CONFERENCE 2007}}, pages = {{12033-12033}}, note = {{Accessed on 2025/04/17}}}