TY  - JOUR

T1  - Quantum-interferometric optical lithography: Towards arbitrary two-dimensional patterns

JO  - Physical Review A. Atomic, Molecular, and Optical Physics

PY  - 2001/06/01

AU  - Kok P

AU  - Boto AN

AU  - Abrams DS

AU  - Williams CP

AU  - Braunstein SL

AU  - Dowling JP

ED  - 

VL  - 63

IS  - 6

Y2  - 2024/12/22

ER  -