@article{article, title = {{Clustering in gallium ion beam sputtered compound materials driven by bond strength and interstitial/vacancy reaction}}, publisher = {{AIP Publishing}}, url = {{http://dx.doi.org/10.1063/5.0161681 }}, year = {{2023}}, month = {{9}}, author = {{Ma Z and Zhang X and Liu P and Deng Y and Hu W and Chen L and Zhu J and Chen S and Wang Z and Shi Y and Ma J et al}}, doi = {{10.1063/5.0161681}}, volume = {{123}}, journal = {{Applied Physics Letters}}, issue = {{10}}, note = {{Accessed on 2024/12/22}}}