TY  - JOUR

T1  - The measurement and control of the ion energy distribution function at a surface in an RF plasma

JO  - Measurement Science and Technology

UR  - http://dx.doi.org/10.1088/0957-0233/11/12/312

PY  - 2000/11/20

AU  - Barton D

AU  - Heason DJ

AU  - Short RD

AU  - Bradley JW

ED  - 

DO  - DOI: 10.1088/0957-0233/11/12/312

PB  - IOP Publishing

VL  - 11

IS  - 12

SP  - 1726

EP  - 1731

Y2  - 2024/12/22

ER  -