TY  - JOUR

T1  - The importance of ions in low pressure PECVD plasmas

JO  - Frontiers in Physics

UR  - http://dx.doi.org/10.3389/fphy.2015.00003

PY  - 2015/02/04

AU  - Michelmore A

AU  - Whittle JD

AU  - Short RD

ED  - 

DO  - DOI: 10.3389/fphy.2015.00003

PB  - Frontiers Media SA

VL  - 3

Y2  - 2024/12/22

ER  -