@article{article, title = {{The importance of ions in low pressure PECVD plasmas}},
publisher = {{Frontiers Media SA}},
url = {{http://dx.doi.org/10.3389/fphy.2015.00003 }},
year = {{2015}},
month = {{2}},
author = {{Michelmore A and Whittle JD and Short RD}},
doi = {{10.3389/fphy.2015.00003}},
volume = {{3}},
journal = {{Frontiers in Physics}},
note = {{Accessed on 2025/01/07}}}