@inproceedings{inproceedings, title  = {{RF-plasma source qualification and compositional characterisation of GaNAs superlattices using SIMS}},

 url = {{}},

 year = {{2006}},

 month = {{7}},

 author = {{Mulcahy CPA and Barker SJ and Williams RS and Hopkinson M and Ashwin M and Stavrinou PN and Parry G and Biswass S and Jones TS}},

 doi = {{10.1016/j.apsusc.2006.02.141}},

 volume = {{252}},

 journal = {{APPLIED SURFACE SCIENCE}},

 issue = {{19}},

 pages = {{7218-7220}},

 note = {{Accessed on 2024/12/22}}}