TY - JOUR T1 - Fabrication and characterization of InP-based quantum cascade distributed feedback lasers with inductively coupled plasma etched lateral gratings JO - JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS PY - 2007/04/01 AU - Kennedy K AU - Revin DG AU - Krysa AB AU - Groom KM AU - Wilson LR AU - Cockburn JW AU - Hogg RA ED - DO - DOI: 10.1143/JJAP.46.2424 VL - 46 IS - 4B SP - 2424 EP - 2428 Y2 - 2024/12/23 ER -