@article{article, title  = {{Dual wavelength optical metrology using ptychography}},

 url = {{}},

 year = {{2013}},

 month = {{3}},

 author = {{Claus D and Robinson DJ and Chetwynd DG and Shuo Y and Pike WT and De J Toriz Garcia JJ and Rodenburg JM}},

 doi = {{10.1088/2040-8978/15/3/035702}},

 volume = {{15}},

 journal = {{Journal of Optics (United Kingdom)}},

 issue = {{3}},

 note = {{Accessed on 2024/12/22}}}