TY - JOUR T1 - Generation of nanostructures by scanning near-field photolithography of self-assembled monolayers and wet chemical etching JO - NANO LETT PY - 2002/11/01 AU - Sun SQ AU - Leggett GJ ED - DO - DOI: 10.1021/nl0257541 VL - 2 IS - 11 SP - 1223 EP - 1227 Y2 - 2024/12/22 ER -