@article{article, title = {{Generation of nanostructures by scanning near-field photolithography of self-assembled monolayers and wet chemical etching}}, url = {{}}, year = {{2002}}, month = {{11}}, author = {{Sun SQ and Leggett GJ}}, doi = {{10.1021/nl0257541}}, volume = {{2}}, journal = {{NANO LETT}}, issue = {{11}}, pages = {{1223-1227}}, note = {{Accessed on 2024/12/22}}}