TY  - JOUR

T1  - Observation of vertical and lateral Ge segregation in thin undulating SiGe layers on Si by electron energy-loss spectroscopy

JO  - APPL PHYS LETT

PY  - 1997/08/11

AU  - Walther T

AU  - Humphreys CJ

AU  - Cullis AG

ED  - 

VL  - 71

IS  - 6

SP  - 809

EP  - 811

Y2  - 2024/12/22

ER  -