@inproceedings{inproceedings, title = {{Reduction of dark current and unintentional background doping in InGaAsN photodetectors by ex situ annealing}}, url = {{}}, year = {{2010}}, month = {{1}}, author = {{Tan SL and Tan LJJ and Goh YL and Zhang S and Ng JS and David JPR and Marko IP and Allam J and Sweeney SJ and Adams AR}}, doi = {{10.1117/12.853912}}, isbn = {{9780819481993}}, volume = {{7726}}, journal = {{Proceedings of SPIE - The International Society for Optical Engineering}}, note = {{Accessed on 2025/05/08}}}