@article{article, title  = {{Vacuum processes in the Electronics Industry}},

 url = {{}},

 year = {{1986}},

 month = {{1}},

 author = {{Simpson M}},

 volume = {{22}},

 journal = {{Chemistry in Britain}},

 issue = {{8}},

 pages = {{733-738}},

 note = {{Accessed on 2024/12/22}}}