TY  - JOUR

T1  - Measurement of the Al content in AlGaN epitaxial layers by combined energy-dispersive X-ray and electron energy-loss spectroscopy in a transmission electron microscope

JO  - Physica Status Solidi. C: Current Topics in Solid State Physics

PY  - 2012/01/01

AU  - Amari H

AU  - Kappers MJ

AU  - Humphreys CJ

AU  - Cheze C

AU  - Walther T

ED  - 

DO  - DOI: 10.1002/pssc.201100165

PB  - Wiley

VL  - 9

IS  - 3-4

SP  - 1079

EP  - 1082

Y2  - 2024/12/22

ER  -