TY  - JOUR

T1  - A LOW-COST DEEP-ULTRAVIOLET (UV) LIGHT-SOURCE FOR BILEVEL RESIST APPLICATIONS

JO  - J VAC SCI TECHNOL B

PY  - 1987/05/01

AU  - POWELL AL

AU  - ROCKETT PI

AU  - ROBSON PN

ED  - 

VL  - 5

IS  - 3

SP  - 671

EP  - 673

Y2  - 2024/12/22

ER  -